Entegris ultrapure gas filtration products offer 0.003 microns particle removal in ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Wafergard Micro and Wafergard Max
- Compact design suitable for flow rates up to 30 slm (Micro) or 1000 slm (Max)
- PTFE-membrane guarantees compatibility with almost all gas types.
- Short Dry-Down-Time and long service life
- Available with VCR- or compression fittings
basan – your partner
for controlled environment solutions