NT Integrated Flow Controller, Model 6510 and 6520


  • Ideal for continuous control in critical dispense applications
    - Corrosion resistance
    - No moving components, therefore reduced contamination risk
    - Nonmetallic sensing technology based on differential pressure provides reliable
  • Compact design. The small footprint saves valuable space and allows toolmakers to integrate more process functionality
  • NT-Model 6510, for high-precision dosing with aggressive chemicals
  • NT-Model 6520, for high-flow applications such as bulk delivery or tool liquid dispense



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