Gas Filtration

Entegris ultrapure gas filtration products offer 0.003 microns particle removal in ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.

Wafergard Micro and Wafergard Max



  • Compact design suitable for flow rates up to 30 slm (Micro) or 1000 slm (Max)
  • PTFE-membrane guarantees compatibility with almost all gas types.
  • Short Dry-Down-Time and long service life
  • Available with VCR- or compression fittings


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